NONLINEAR DAMPING IN MEMS/NEMS BEAM RESONATORS RESULTING FROM CLAMPING LOSS
André Gusso1; Jéssica Pimentel1
1 Universidade Federal Fluminense
Resumo
We present two new energy loss mechanisms that induce nonlinear damping in suspended beam micro- and nanoresonators. Both mechanisms involve acoustic losses through the clamping region. In one mechanism the axial stress due to the geometric nonlinearity produces the acoustic waves at the clampings. In the second mechanism energy is lost due to the vibrations induced at the clamping region by the higher frequency harmonics present in the beam vibration resulting from the nonlinear dynamics. Analytical expressions for the average energy dissipated, quality factor and nonlinear dissipation coefficients are derived.
Palavras-chave: Analysis and Control of Nonlinear Dynamical Systems with Practical Applications; Modeling, Numerical Simulation and Optimization; Nonlinear Dynamics and Complex Systems; Nonlinear Damping; Beam Resonators