NONPARAMETRIC MATHEMATICAL MODELING OF BEAMS SPOILED FROM ELASTIC MASSES MEMS OF THE DOBLE BRIDGE TYPE

MARCELO TRESSENO¹; AIRAM SAUSEN¹; MANUEL MARTIN PÉREZ REIMBOLD¹; FLAVIO KIECKOW²; Augusto Ost³

¹ UNIJUI-Campus Ijui; ² URI-Campus Santo Ângelo; ³ UNIJUI

doi:10.20906/CPS/COB-2015-1463

Resumo

The technology MEMS (Micro-Electro-Mechanical Systems) is innovative and stands out for an applications unlimited range, especially in the sensor and actuator design. From use of micromachining techniques, millions of devices are manufactured on a single silicon wafer. However, it is known that the processes used in the manufacture also present limitations. This fact results in making some damaged structures during the manufacturing process. The main problem observed is the break beams elastic masses deformable. So, it is necessary to develop a methodology that makes the identification of these defects before marketing. Therefore, this paper aims at to detect the breaks in beams elastic masses by using nonparametric mathematical models from System Identification theory. The object of study is an elastic mass, whose structure follows the double bridge typology used in comb-drive transducers. The structure was modeled from the finite element method in ANSYS® software. Simulations of the intact and damaged structure behavior were realized to obtain data regarding the force and the elastic mass displacement. From the collected data, a spelling database or signatures was created using the computational tool Matlab®. Through qualitative analysis of nonparametric models was possible to detect the fractured beam.

Palavras-chave: Faults; Elastic Deformation; Comb-drive; Signature